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ULVAC - Evaporation System

ULVAC - Evaporation System

Oxide Deposition. This is a batch type high vacuum evaporation system for the deposition of metal and oxide on a substrate. Since the operation panel of this system has an integrated control function that realizes automated vacuum and deposition process, it is recommended for R&D use as well as for small-scale manufacturing.

Two-tone metal pattern transfer technique using a single .

Two-tone metal pattern transfer technique using a single .

For the release treatment, a 30 nm-thick chromium layer was vacuum deposited as a metal layer on the surface of the processed GC by a vacuum evaporation machine (VPC-260F; ULVAC KIKO, Inc.) [9 .

Two-tone metal pattern transfer technique using a single .

Two-tone metal pattern transfer technique using a single .

For the release treatment, a 30 nm-thick chromium layer was vacuum deposited as a metal layer on the surface of the processed GC by a vacuum evaporation machine (VPC-260F; ULVAC KIKO, Inc.) [9 .

Three-dimensional thermal nanoimprinting by using lift-off .

Three-dimensional thermal nanoimprinting by using lift-off .

Jul 01, 2016 · A chromium layer approximately 30 nm thick was deposited by physical vapor deposition with a resistance-heating type vacuum vapor-deposition system (VPC-260F; Ulvac Kiko Inc., Saito City), and the vacuum evaporation .

ULVAC

ULVAC

Low-Cost RTA for Small Samples. This table top IR Furnace system is built up from a collection of stand-alone components including IR Furnace, quartz protective sample chamber, sample holder and temperature controller.

(PDF) Simple Fabrication Technique for Field-Effect .

(PDF) Simple Fabrication Technique for Field-Effect .

using a thermal evaporator (ULVAC VPC-260F) with quartz crystal thickness meter (CRTM-6000), were 15 nm and 50 nm, r espectivel y. The su bstrat e with el ectrode s was su bjected to oxygen plasma

Ananofoaming process and dielectric properties of .

Ananofoaming process and dielectric properties of .

Anapplication of micro-thermal analysis to polymer blends. pdf 447 Кб Ananalysis in support of sediment quality thresholds for polycyclic aromatic hydrocarbons (PAHs) to protect estuarine fish. pdf 240 Кб .

Thermal Evaporator | Nanofabrication Laboratory

Thermal Evaporator | Nanofabrication Laboratory

Name Thermal Evaporator Model ULVAC VPC-260F Description Thermal evaporator is the simpler alternative for thin film metal deposition. The unit use the electrical resistivity to evaporate the metal .

(PDF) Ultrasonic ablation as a novel technique for .

(PDF) Ultrasonic ablation as a novel technique for .

1 Third Generation Solar Cells Laboratory, Department of Physics, . using a thermal evaporation system (ULVAC VPC-1100) at. . This undoubtedly presents a challenging task to nanofabrication .

Thermal Evaporator | Nanofabrication Laboratory

Thermal Evaporator | Nanofabrication Laboratory

Name Thermal Evaporator Model ULVAC VPC-260F Description Thermal evaporator is the simpler alternative for thin film metal deposition. The unit use the electrical resistivity to evaporate the metal .

(PDF) Simple Fabrication Technique for Field-Effect .

(PDF) Simple Fabrication Technique for Field-Effect .

using a thermal evaporator (ULVAC VPC-260F) with quartz crystal thickness meter (CRTM-6000), were 15 nm and 50 nm, r espectivel y. The su bstrat e with el ectrode s was su bjected to oxygen plasma

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【】., Top :2426597 :02-29081350 :02-2, .

Three-dimensional thermal nanoimprinting by using lift-off .

Three-dimensional thermal nanoimprinting by using lift-off .

Jul 01, 2016 · A chromium layer approximately 30 nm thick was deposited by physical vapor deposition with a resistance-heating type vacuum vapor-deposition system (VPC-260F; Ulvac Kiko Inc., Saito City), and the vacuum evaporation .

Hot-Wire-Assisted Atomic Layer Deposition of High-Quality .

Hot-Wire-Assisted Atomic Layer Deposition of High-Quality .

Jan 22, 2020 · To decrease the contact resistance of the bottom electrode, native SiO 2 on the backside of the Si wafer was mechanically polished and an 100-nm-thick Al film deposited via vacuum evaporation (VPC-260F; Ulvac .

Hot-Wire-Assisted Atomic Layer Deposition of High-Quality .

Hot-Wire-Assisted Atomic Layer Deposition of High-Quality .

Jan 22, 2020 · To decrease the contact resistance of the bottom electrode, native SiO 2 on the backside of the Si wafer was mechanically polished and an 100-nm-thick Al film deposited via vacuum evaporation (VPC-260F; Ulvac .

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Real-Time Glucose Sensing by Surface-Enhanced Raman .

Real-Time Glucose Sensing by Surface-Enhanced Raman .

Further, a vacuum deposition system (VPC-260F, Ulvac) was used to vapor deposit a 50-nm thick coat of silver (401385, Nilaco) on the nanoparticles, using an evaporation mask that matched the shape .

Hot-Wire-Assisted Atomic Layer Deposition of High-Quality .

Hot-Wire-Assisted Atomic Layer Deposition of High-Quality .

Jan 22, 2020 · To decrease the contact resistance of the bottom electrode, native SiO 2 on the backside of the Si wafer was mechanically polished and an 100-nm-thick Al film deposited via vacuum evaporation (VPC-260F; Ulvac .

Mechanism and optimization of metal deposition onto vertically

Mechanism and optimization of metal deposition onto vertically

Mechanism and optimization of metal deposition onto vertically aligned single walled carbon nanotube arrays Hai M. Duong, Kei Ishikawa, Jun Okawa, Kazuaki Ogura, Erik Einarsson, Junichiro Shiomi, .

(PDF) Ultrasonic ablation as a novel technique for .

(PDF) Ultrasonic ablation as a novel technique for .

1 Third Generation Solar Cells Laboratory, Department of Physics, . using a thermal evaporation system (ULVAC VPC-1100) at. . This undoubtedly presents a challenging task to nanofabrication .

Thermal Evaporator | Nanofabrication Laboratory

Thermal Evaporator | Nanofabrication Laboratory

Name Thermal Evaporator Model ULVAC VPC-260F Description Thermal evaporator is the simpler alternative for thin film metal deposition. The unit use the electrical resistivity to evaporate the metal source (i.e. Al, Ag etc.). Deposition chamber is operated under high vacuum around 104Pa by the re .

Apr 01, 2018 · Wafer-level vacuum /hermetic packaging technologies for MEMS. NASA Astrophysics Data System (ADS) Lee, Sang-Hyun; Mitchell, Jay; Welch, Warren; Lee, Sangwoo; Najafi .

Apr 01, 2018 · Wafer-level vacuum /hermetic packaging technologies for MEMS. NASA Astrophysics Data System (ADS) Lee, Sang-Hyun; Mitchell, Jay; Welch, Warren; Lee, Sangwoo; Najafi .

VPC-260F > small vacuum systems

VPC-260F > small vacuum systems

ULVAC KIKO, a member of the ULVAC GROUP, provides vacuum pumps and vacuum pumping solutions for a wide variety of industries and applications. . Since an evaporation power supply and electrode have been added, simultaneous evaporation and multi-layer evaporation are possible. . VPC-260F: Vacuum performance: Ultimate pressure. 1.3 × 10-3 Pa .

Mechanism and optimization of metal deposition onto vertically

Mechanism and optimization of metal deposition onto vertically

Mechanism and optimization of metal deposition onto vertically aligned single walled carbon nanotube arrays Hai M. Duong, Kei Ishikawa, Jun Okawa, Kazuaki Ogura, Erik Einarsson, Junichiro Shiomi, Shigeo Maruyama* Department of Mechanical Engineering, The University of Tokyo 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-8656, Japan * Author email: [email protected]

JPWO2017043472A1 - Photocatalytic electrode and module for .

JPWO2017043472A1 - Photocatalytic electrode and module for .

The subject of this invention is providing the photocatalyst electrode for oxygen generation which shows a favorable onset potential, and a module including the same. The photocatalytic electrode for oxygen .

ULVAC - Evaporation

ULVAC - Evaporation

EW Series models are deposition systems for evaporation of metal or oxides onto continuously-wound plastic film, paper or metal foil. View Details and Specs Ei-5

Vacuum Evaporation System. Maker: ULVAC KIKO, Inc. Model: VPC-260F . Location: D3-106. Function: Thin films can be formed by resistance-heating evaporation. We mainly use it for the .

Jan 01, 2018 · A novel multi-level IC-compatible surface microfabrication technology for MEMS with independently controlled lateral and vertical submicron transduction gaps. NASA Astrophysics Da